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C04400 - SEMI C44 - Specification and Guide for Sulfuric Acid Revision:SEMI C44-0618 - Superseded arithmetic mean deviation of the

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Description

arithmetic mean deviation of the assessed profile and Rq

Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation

本方法において定義されるチューブは,管状の形をしており,PFA材質でできている。

When the resin is supplied in non-mixed form (i

1 This Standard applies to the determination of metal extractable impurity characteristics of high purity materials and the wetted surfaces of components and equipment used in chemical distribution systems

C04400 - SEMI C44 - Specification and Guide for Sulfuric Acid Revision:SEMI C44-0618 - Superseded arithmetic mean deviation of the1 Purpose 1. 1 The first purpose of this Specification and Guide is to standardize requirements for Grades of sulfuric acid used in the semiconductor industry and to document testing procedures that may be used to support those requirements. Alternative methods may also be used as long as they comply with SEMI C1 requirements for method validation. 1. 2 This Specification and Guide also provides assay and impurity limits for higher purity Tiers of

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