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2 This Guide describes wafer stacks with nominal diameter of 300 mm
1 mm thick (max) in a flat panel display (FPD) manufacturing facility
or are looking for company-wide access
3 Manufacturing processes incorporating bonded wafers typically require thinned wafers
This standard defines the datum line of an ID two-dimensional code (hereafter
C00329 - SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality Revision:SEMI C3.29-0200 (Withdrawn 0303) - Replaced 2 This Guide describes waferThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at www. semi. org in September 1999; originally published in 1986; previously published in 1996. NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59. Nitrogen is an odorless, tasteless, diatomic gas
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