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SEMI M77-1015 (technical revision)
B：形状測定を使用した段差法
SEMI MF1982-1110 (technical revision)
1 This Specification provides a common set of constructs that can be used by the equipment manufacturer to model their equipment structure and related elements
SEMI C35 — Specifications and Guideline for Nitric Acid
F01300 - SEMI F13 - Guide for Gas Source Control Equipment StdPbc-0512 SEMI M77-1015 (technical revision)This guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www. semi. org September 2001; to be published November 2001. Originally published in 1993. The purpose of this document is to provide a guide for the design and operational requirements