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The intent of this Standard is to facilitate the integration of Stocker SEM equipment into an automated (e
多重プロセス装置および他の複合装置へのインタフェースについての標準モデルを定義する
2 This Standard establishes limits on impurities extractable from components
which will improve manufacturing efficiency by saving manufacturing cost and time
SEMI C27-0699 (first published - replaces SEMI C1
M02600 - SEMI M26 - Guide for the Re-Use of 100, 125, 150, and 200 mm Wafer Shipping Boxes Used to Transport Wafers StdPbc-0801 The intent of this StandardThis guide was technically approved by the global Silicon Wafer Committee and is the direct responsibility of the Japanese Silicon Wafer Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be March 2004. Originally published in 1995; last published in 1996. This document is a guide for box cleaning services, wafer suppliers, and wafer users for the
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