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previously published February 2011
Leach-out procedures referenced within this Guide provide values for both static and dynamic conditions
and Total Thickness Variation on Silicon Wafers by Automated Noncontact Scanning
colorless liquid which hydrolizes in the presence of moisture
orgで，そして2009年11月にCD-ROMで入手可能となる。初版は1988年月発行，前版は2001年11月に発行された。
C00319 - SEMI C3.19 - Standard for Hydrogen (H2), 99.9995% Quality Revision:SEMI C3.19-0200 - Replaced previously published February 2011NOTICE: This document was replaced by SEMI C58 in 2005. Recognizing the importance of impurity content of gases in the manufacture of semiconductors, suppliers responded by introducing products with improved analytical characterization, notably for trace impurities. Products which meet all of the requirements may be described as "meeting SEMI specifications." Where an analytical procedure different from that provided is substituted by a supplier or
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