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SEMI M35 — Guide for Developing Specifications for Silicon Wafer Surface Features Detected by Automated Inspection
which is the root of the SAN Standard
2 This Specification defines standards that facilitate the host’s knowledge and role in automated and manual carrier transfers
E12100 - SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications StdPbc-0713 3公分）至30英吋（76The inclusion of eXtensible Markup Language (XML) notation within current SEMI Standards reflects the industrys growing interest in XML technology. This Guide is the first step to prepare for XML protocols in SEMI Standards and to establish consistency in XML style and usage. Recommendations given in this Document are intended for the definition and conformance of XML based standards. This Document also attempts to highlight those areas where