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This Document can be used as a Guide for equipment manufacturers during the design and testing of their equipment and by those who either use or produce reticles and other EES items
and behavior are not required to be compliant to this Specification
SEMI E51-95 (first published)
This edition was approved for publication by the global Audits and Reviews Subcommittee on November 29
2-0923 (technical revision)
D05300 - SEMI D53 - Specification for Flat Panel Display (FPD) Pellicles Revision:SEMI D53-0626 - Current + Redline This Document can be used1 Purpose 1. 1 This Specification defines standard stand off, transmittance, and strength of pellicle films used for masks. 2 Scope 2. 1 These dimensions apply to pellicle for masks that are principally used in fabricating flat panel displays. The mask size specifies range from 330 mm 450 mm to 1620 mm 1780 mm. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility