M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1014 - Superseded SEMI E171-0216 (technical revision)

SEMI E171-0216 (technical revision)

半導体製造装置の持つ基本的なSECS-II通信性能の定義

to be published July 2001

This Document specifies the interior exclusion volumes for supporting and restraining wafers in the 450 mm carrier

and materials acceptance

M00100 - SEMI M1 - 鏡面単結晶シリコンウェーハの仕様 Revision:SEMI M1-1014 - Superseded SEMI E171-0216 (technical revision)SEMI SEMI SOI TTV 1 322216 nm300450 mm1 Polycrystalline siliconSEMI M16 JEITA EM 3601A, SEMI M62, SEMI M61, SEMI M8, SEMI M24, SEMI M38, SEMI M57, SOISEMI M41SEMI M71JEITA EM 3603B, SEMI PV22 SOI 23SI100 mm 1. 10. 11. 10. 21. 111. 121. 13. 1 1. 13. 2JEITA EM 36021. 15JEITA EM 3602 1. 1 2 1. 2 3 1. 5 100mm525m m 1. 6 100mm625m m 1. 7 125mm 1. 8. 1 150mmT 3 1. 8. 2 150mmT 4 1. 9. 1 200mmT 3 1. 9. 2 200mmT 4 1. 9. 3 200mm 1. 10. 1 200mmT 3 1. 10. 2