MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0317 (Reapproved 1023) - Current SEMI M77-1015 (technical revision)

SEMI M77-1015 (technical revision)

org in September 2013

SEMI E5-0224 (technical revision)

本文は示差走査熱量分析（DSC）により，エポキシモールディングコンパウンドを評価する方法を記述したものである。

This Practice together with the referenced standards may be used for process control

MF198200 - SEMI MF1982 - Test Method for Analyzing Organic Contaminants on Silicon Wafer Surfaces by Thermal Desorption Gas Chromatography Revision:SEMI MF1982-0317 (Reapproved 1023) - Current SEMI M77-1015 (technical revision)Organics are present in many materials, such as plastics, lubricants, cleansers, soaps, and living tissues. Some of these compounds are volatile and others can become airborne through chemical reactions, heating, abrasion, or outgassing. Organic compounds are present in many materials such as parts and components for cleanrooms, carriers, FOUP, developers, and organic removers. Some of these organic compounds are volatile and some can be discharged