C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI C92-0216 - Replaced and wafer to wafer stacking

and wafer to wafer stacking

filters and passive components such as pressure gauges/transducers and flow meters

4に続く式3が追加された。

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it is always possible that the test could yield a faulty result through some unforeseen defect in the analytical equipment

C09200 - SEMI C92 - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Revision:SEMI C92-0216 - Replaced and wafer to wafer stackingNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F119. The purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G48 and is intended to differentiate between stainless steels of differing