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Only the physical interfaces for the load port are specified
1 Purpose
이 표준에서는 장비내의 재료 프로세싱에 관한 반도체 제조 환경에 필요한 통신을 다룬다
FTV system includes automated guided vehicle (AGV) system and rail guided vehicle (RGV) system
many items are not now commonly specified
G05300 - SEMI G53 - Specification for Metal Lid/Preform Assembly StdPbc-0116 Only the physical interfaces forThis specification provides guidelines for the design and acceptance of metal lid preform assemblies. This specification may be used by suppliers at outgoing inspection and by the customers at incoming inspection. The design and acceptance criteria may be used for metal lid preform assemblies used on all types of semiconductor packages. Improper lid preform design and poorly specified lid preforms contributes to low sealing yields and unreliable
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