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1 This Guide applies to BCDS used in semiconductor manufacturing facilities for supplying liquid chemicals to wafer manufacturing processes
health and safety (EH&S) issues associated with their use
静電気の数々の制御方法は，静電気を許容レベルにまで抑制するために装置設計に組み込むことができる｡本文書は，装置製造業者およびクリーンルーム設備の設計者が装置設計を行う際に，ガイドとして使用され得る｡半導体製造に使用されるシリコンウェーハやレチクルの製造業者にとっても有用である。記載された試験方法は，静電気の制御方法の有効性を明らかにするために使用される。エンドユーザは，設備の建設後や設計変更後にこれらの試験方法を用いて装置の設計仕様との適合性を検証し，工場のメンテナンス作業の一貫としての現行の適合性を検証できる｡
Failure mechanisms
The focus of this Document is on geometry-related metrology and measurands important for definition and control of fabrication and inspection operations on structures that include openings for TSV
S01700 - SEMI S17 - Safety Guideline for Unmanned Transport Vehicle (UTV) Systems Revision:SEMI S17-0319 - Inactive 1 This Guide applies toThis Safety Guideline is intended as a set of safety considerations for unmanned transport vehicle (UTV) system. UTV system is used to automate the movement of material within semiconductor or flat panel display (FPD) factories or laboratories. UTV system includes both floor traveling vehicle (FTV) system and overhead traveling vehicle (OTV) system. This Safety Guideline applies to UTV and UTV system used in semiconductor or FPD manufacturing. This